Wafer Stepper

GCA Waferstepper DSW 8000/8500

• Available for these systems are G‐LINE and I‐LINE optics. Global and local alignment integrated as required. These systems are offered with PC Upgrades.
• Substrates to 6 “, possible to add change chucks.
• Area of implementation: Customized as required.

GCA Waferstepper ALS 200

• For these systems G‐LINE and I‐LINE optics are available.Global and local alignment integrated as required.These systems are offered with PC Upgrades.
• Substrates to 8 “, possible to add change chucks.
• Area of implementation: Customized as required

GCA Waferstepper Autostep

• For these systems G‐LINE and I‐LINE optics are available.Global and local alignment integrated as required.
• These systems are analogue to ALS systems
• The technical differences must be explained.
• The systems are offered with PC Upgrades
• Substrates to 8 “, possible to add change chucks.
• Area of implementation: Customized as required.