Pattern Generatoren

For the niche market these machines are ‐ due to the small follow‐up costs ‐ a welcome addition and/or alternative to the well‐known mass production machines. In this generation systems with the established lens aperture technology are controlled by PC systems.

In dependence of the reduction optics line widths up to 1,0μm can be achieved. These systems are equipped with a mercury vapor lamp. Optionally the use of emulsion masks is possible.

The individuality of these machines can be increased by a change chuck system.